Efficiency Improvement of Electro-Mechanical Systems

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Nano-opto-electro-mechanical systems.

A new class of hybrid systems that couple optical, electrical and mechanical degrees of freedom in nanoscale devices is under development in laboratories worldwide. These nano-opto-electro-mechanical systems (NOEMS) offer unprecedented opportunities to control the flow of light in nanophotonic structures, at high speed and low power consumption. Drawing on conceptual and technological advances ...

Micro - Electro - Mechanical - Systems ( Mems )

Robust Position Control of Electro-mechanical Systems

In this work, the robust position control scheme is proposed for the electro-mechanical system using the disturbance observer and backstepping control method. To the external unknown load of the electro-mechanical system, the nonlinear disturbance observer is given to estimate the external unknown load. Combining the output of the developed nonlinear disturbance observer with backstepping techn...